Invention Application
- Patent Title: Automated design and execution of experiments with integrated model creation for semiconductor manufacturing tools
- Patent Title (中): 半导体制造工具集成模型创建实验的自动设计和执行
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Application No.: US10759108Application Date: 2004-01-20
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Publication No.: US20040148049A1Publication Date: 2004-07-29
- Inventor: Alexander T. Schwarm
- Applicant: Applied Materials, Inc.
- Applicant Address: CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: CA Santa Clara
- Main IPC: G06F019/00
- IPC: G06F019/00
Abstract:
A method, system and medium of automation performed on a semiconductor manufacturing tool. The method creates a designed set of experiments for the tool and runs the created set of experiments. The method also collects data resulting from running the experiments and creates a model based on the collected data. The created model is used in automatically controlling the tool.
Public/Granted literature
Information query
