Invention Application
US20040157530A1 Lapping apparatus and lapping method 失效
研磨装置和研磨方法

Lapping apparatus and lapping method
Abstract:
A film feeder (FF1) feeds a film (1), a first drive (20) rotates a work (W), a second drive (30) moves the work (W) relative to the film(1), a shoe set handler (40) handles the shoe set (2) to press the film (1) against the work (W), and a deterioration delayer (C) is configured to delay an abrasivity deterioration of the film (1).
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