Invention Application
US20040227427A1 Shape memory thin micro-actuator, and method for producing the same 失效
形状记忆薄微致动器及其制造方法

Shape memory thin micro-actuator, and method for producing the same
Abstract:
A micro-actuator includes a shape memory thin film having one end fixed to a substrate and one remaining part which, at room temperature, is in the martensitic phase and assumes a curly-configuration, whereas at a higher temperature than a threshold value it changes to the austenitic condition, wherein the film is completely stretched upon the substrate.
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