Shape memory thin micro-actuator, and method for producing the same
    1.
    发明申请
    Shape memory thin micro-actuator, and method for producing the same 失效
    形状记忆薄微致动器及其制造方法

    公开(公告)号:US20040227427A1

    公开(公告)日:2004-11-18

    申请号:US10842549

    申请日:2004-05-11

    CPC classification number: B81B3/0035 F03G7/065 F05C2251/08 G02B26/0866

    Abstract: A micro-actuator includes a shape memory thin film having one end fixed to a substrate and one remaining part which, at room temperature, is in the martensitic phase and assumes a curly-configuration, whereas at a higher temperature than a threshold value it changes to the austenitic condition, wherein the film is completely stretched upon the substrate.

    Abstract translation: 微致动器包括一个形状记忆薄膜,其一端固定在基底上,另外一部分在室温下处于马氏体相并具有卷曲构型,而在比阈值更高的温度下, 到奥氏体状态,其中膜在基底上完全拉伸。

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