Invention Application
US20040251430A1 METHOD FOR HIGH PRECISION PRINTING OF PATTERNS 有权
高精度印刷图案的方法

METHOD FOR HIGH PRECISION PRINTING OF PATTERNS
Abstract:
An aspect of the present invention includes a method to print pattern with improved edge acuity. In one embodiment a method for printing fine patterns comprising the actions of: providing an SLM and providing a pixel layout pattern with different categories of modulating elements, the categories differing in the phase of the complex amplitude. Other aspects of the present invention are reflected in the detailed description, figures and claims.
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