Invention Application
- Patent Title: METHOD FOR HIGH PRECISION PRINTING OF PATTERNS
- Patent Title (中): 高精度印刷图案的方法
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Application No.: US10460765Application Date: 2003-06-12
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Publication No.: US20040251430A1Publication Date: 2004-12-16
- Inventor: Torbjorn Sandstrom
- Applicant: Micronic Laser Systems AB
- Applicant Address: SE Taby
- Assignee: Micronic Laser Systems AB
- Current Assignee: Micronic Laser Systems AB
- Current Assignee Address: SE Taby
- Main IPC: G21K005/04
- IPC: G21K005/04

Abstract:
An aspect of the present invention includes a method to print pattern with improved edge acuity. In one embodiment a method for printing fine patterns comprising the actions of: providing an SLM and providing a pixel layout pattern with different categories of modulating elements, the categories differing in the phase of the complex amplitude. Other aspects of the present invention are reflected in the detailed description, figures and claims.
Public/Granted literature
- US06833854B1 Method for high precision printing of patterns Public/Granted day:2004-12-21
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