发明申请
- 专利标题： Thermally isolating optical devices
- 专利标题（中）： 热隔离光学器件
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申请号： US10465210申请日： 2003-06-19
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公开(公告)号： US20040258344A1公开(公告)日： 2004-12-23
- 发明人: Behzad Fardi , Farshid Adibi , Chaoyang Li , Anirban Bandyopadhyay , Mahesh Junnarkar
- 主分类号： G02B006/12
- IPC分类号： G02B006/12
摘要：
A thermo-optic device may be formed with trenches that undercut the substrate beneath the thermo-optic device. Through the removal of the underlying substrate, the heat dissipation of the thermo-optic device may be reduced. This may reduce the thermal budget of the device, reducing the power requirements for operating the device in some embodiments.
公开/授权文献
- US06983086B2 Thermally isolating optical devices 公开/授权日：2006-01-03
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