发明申请
- 专利标题： Methods for planarizing a semiconductor contactor
- 专利标题（中）： 平面化半导体接触器的方法
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申请号： US10852370申请日： 2004-05-24
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公开(公告)号： US20040266089A1公开(公告)日： 2004-12-30
- 发明人: Gaetan L. Mathieu , Benjamin N. Eldridge , Gary W. Grube
- 申请人： FormFactor, Inc.
- 申请人地址： null
- 专利权人： FormFactor, Inc.
- 当前专利权人： FormFactor, Inc.
- 当前专利权人地址： null
- 主分类号： H01L021/8238
- IPC分类号： H01L021/8238
摘要：
A planarizer for a probe card assembly. A planarizer includes a first control member extending from a substrate in a probe card assembly. The first control member extends through at least one substrate in the probe card assembly and is accessible from an exposed side of an exterior substrate in the probe card assembly. Actuating the first control member causes a deflection of the substrate connected to the first control member.
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