发明申请
- 专利标题: Cell driving type piezoelectric/electrostrictive actuator and method of manufacturing the same
- 专利标题(中): 电池驱动型压电/电致伸缩致动器及其制造方法
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申请号: US10855448申请日: 2004-05-27
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公开(公告)号: US20050001514A1公开(公告)日: 2005-01-06
- 发明人: Yukihisa Takeuchi , Koji Kimura , Koichi Iwata
- 申请人: Yukihisa Takeuchi , Koji Kimura , Koichi Iwata
- 申请人地址: JP Nagoya-City
- 专利权人: NGK Insulators, Ltd.
- 当前专利权人: NGK Insulators, Ltd.
- 当前专利权人地址: JP Nagoya-City
- 优先权: JP2003-155009 20030530; JP2004-154950 20040525
- 主分类号: B41J2/16
- IPC分类号: B41J2/16 ; B41J2/045 ; B41J2/055 ; B41J2/135 ; B41J2/14 ; B41J2/145 ; F04B9/00 ; F04B17/00 ; F04B43/04 ; G02B6/35 ; H01L27/20 ; H01L41/083 ; H01L41/09 ; H01L41/187 ; H01L41/22 ; H01L41/273 ; H01L41/339 ; H02N2/00
摘要:
A piezoelectric actuator 1 capable of being driven with a high electric field intensity, obtaining a larger displacement and being high in electric conducting reliability of electrodes, and comprising: at least one cell 3 defined by two side walls 6, a substrate 2 and a ceiling wall 7; the two side walls being disposed on the substrate and being covered with the ceiling wall to define one cell, at least the two side walls 6 comprising piezoelectric/electrostrictive devices 4, and the piezoelectric/electrostrictive devices 4 being capable of changing a volume of the cell 3 by displacement of the walls. Each of the piezoelectric/electrostrictive devices 4 comprises a plurality of layered piezoelectric/electrostrictive bodies 14 and electrodes 18, 19 which are alternately stacked, and end portions of the electrodes 18, 19 are embedded in the piezoelectric/electrostrictive bodies 14 in at least the internal side of the cell 3.
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