Invention Application
- Patent Title: Electronic component having a resonator and fabrication process
- Patent Title (中): 具有谐振器和制造工艺的电子部件
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Application No.: US10815472Application Date: 2004-04-01
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Publication No.: US20050001698A1Publication Date: 2005-01-06
- Inventor: Guillaume Bouche , Nick Smears , Pascal Ancey , Gregory Caruyer
- Applicant: Guillaume Bouche , Nick Smears , Pascal Ancey , Gregory Caruyer
- Applicant Address: FR MONTROUGE
- Assignee: STMICROELECTRONICS SA
- Current Assignee: STMICROELECTRONICS SA
- Current Assignee Address: FR MONTROUGE
- Priority: FR0304039 20030401
- Main IPC: H01L27/20
- IPC: H01L27/20 ; H03H9/15 ; H03H9/58
Abstract:
An electronic component (1) includes a substrate (2) and at least two piezoelectric resonators (3, 4) each having an active element (6, 9), a lower electrode (5, 8) and an upper electrode (7, 10). The lower electrode (5) of the first resonator (3) is made of a material that is different from that of the lower electrode (8) of the second resonator (4) such that the resonators exhibit different resonance frequencies.
Public/Granted literature
- US07180224B2 Electronic component having a resonator and fabrication process Public/Granted day:2007-02-20
Information query
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