发明申请
- 专利标题： Electronic component having a resonator and fabrication process
- 专利标题（中）： 具有谐振器和制造工艺的电子部件
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申请号： US10815472申请日： 2004-04-01
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公开(公告)号： US20050001698A1公开(公告)日： 2005-01-06
- 发明人: Guillaume Bouche , Nick Smears , Pascal Ancey , Gregory Caruyer
- 申请人： Guillaume Bouche , Nick Smears , Pascal Ancey , Gregory Caruyer
- 申请人地址： FR MONTROUGE
- 专利权人： STMICROELECTRONICS SA
- 当前专利权人： STMICROELECTRONICS SA
- 当前专利权人地址： FR MONTROUGE
- 优先权： FR0304039 20030401
- 主分类号： H01L27/20
- IPC分类号： H01L27/20 ; H03H9/15 ; H03H9/58
摘要：
An electronic component (1) includes a substrate (2) and at least two piezoelectric resonators (3, 4) each having an active element (6, 9), a lower electrode (5, 8) and an upper electrode (7, 10). The lower electrode (5) of the first resonator (3) is made of a material that is different from that of the lower electrode (8) of the second resonator (4) such that the resonators exhibit different resonance frequencies.