发明申请
- 专利标题： Apparatus for transporting plate-shaped work piece
- 专利标题（中）： 运输板状工件的装置
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申请号： US10823408申请日： 2004-04-13
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公开(公告)号： US20050002743A1公开(公告)日： 2005-01-06
- 发明人: Susumu Moriya , Shigeto Murayama , Yuichi Morimoto , Yoshiteru Ikehata , Takayoshi Ohno
- 申请人： Susumu Moriya , Shigeto Murayama , Yuichi Morimoto , Yoshiteru Ikehata , Takayoshi Ohno
- 申请人地址： JP Osaka
- 专利权人： DAIFUKU CO., LTD.
- 当前专利权人： DAIFUKU CO., LTD.
- 当前专利权人地址： JP Osaka
- 优先权： JP2003-109137 20030414; JP2003-270686 20030703; JP2003-271947 20030708; JP2003-274874 20030715
- 主分类号： B65G49/02
- IPC分类号： B65G49/02 ; B65G49/06 ; H01L21/677
摘要：
It is an object to provide a plate-shaped work piece transporting apparatus provided with a blowing mechanism for contactlessly supporting a plate-shaped work piece that is transported, where the blowing mechanism is provided with a dust-removal filter and a blowing mechanism for sending air to the lower surface of the plate-shaped work piece via the dust-removal filter. In a first embodiment, a driving mechanism for contacting the plate-shaped work piece and moving it in the transporting direction is provided.
公开/授权文献
- US07108474B2 Apparatus for transporting plate-shaped work piece 公开/授权日：2006-09-19
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