发明申请
- 专利标题: Optoelectronic device having dual-structural nano dot and method for manufacturing the same
- 专利标题(中): 具有双结构纳米点的光电器件及其制造方法
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申请号: US10912614申请日: 2004-08-04
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公开(公告)号: US20050006636A1公开(公告)日: 2005-01-13
- 发明人: Kyu Shim , Young Song , Sang Kim , Jin Kang
- 申请人: Kyu Shim , Young Song , Sang Kim , Jin Kang
- 优先权: KR2002-52210 20020831
- 主分类号: H01L29/12
- IPC分类号: H01L29/12 ; H01L31/102 ; H01L33/08 ; H01L33/18 ; H01L21/00 ; H01L33/00
摘要:
An optoelectronic device and a method of manufacturing the same which the optoelectronic effect such as light emission or light reception can be increased by forming a dual-structural nano dot to enhance the confinement density of electrons and holes are provided. The optoelectronic device comprises an electron injection layer, a nano dot, and a hole injection layer. The nano dot has a dual structure composed of an external nano dot and an internal dot. The method of manufacturing the optoelectronic device comprises the steps of forming an electron injection layer on a semiconductor substrate; growing nano dot layer on the electron injection layer by an epi-growth method; heating the nano dot layer so that the nano dot has a dual structure composed of an external nano dot and an internal nano dot; and forming a hole injection layer on the overall structure.
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