发明申请
- 专利标题: Method for manufacturing magnetic field detecting element
- 专利标题(中): 磁场检测元件的制造方法
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申请号: US10784479申请日: 2004-02-23
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公开(公告)号: US20050006713A1公开(公告)日: 2005-01-13
- 发明人: Dong-sik Shim , Kyung-won Na , Sang-on Choi , Hae-seok Park , Jun-sik Hwang
- 申请人: Dong-sik Shim , Kyung-won Na , Sang-on Choi , Hae-seok Park , Jun-sik Hwang
- 专利权人: Sansung Electronics Co., Ltd.
- 当前专利权人: Sansung Electronics Co., Ltd.
- 优先权: KR2003-11807 20030225; KR2003-34191 20030528
- 主分类号: G01R33/02
- IPC分类号: G01R33/02 ; G01R33/028 ; G01R33/04 ; G01R33/05 ; H01F17/00 ; H01F41/04 ; H01F41/14 ; H01F41/34 ; H01L43/00 ; G11B5/127
摘要:
Disclosed is a method for manufacturing a magnetic field detecting element, capable of simplifying the manufacturing process and providing a thin-type magnetic field detecting element. The disclosed method for manufacturing a magnetic field detecting element according to the present invention, is characterized in forming a seed film on the semiconductor substrate, then partially removing the seed film using a predetermined pattern in advance, for insulation of a plurality of coil lines that would be formed on the seed film, forming a soft magnetic core, and cutting off edges of the semiconductor substrate so that a plurality of the coil lines may be insulated.
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