Invention Application
US20050011444A1 Vapor deposition systems having separate portions configured for purging using different materials and methods of operating same
审中-公开
蒸气沉积系统具有被配置为使用不同材料进行吹扫的分离部分和操作相同的方法
- Patent Title: Vapor deposition systems having separate portions configured for purging using different materials and methods of operating same
- Patent Title (中): 蒸气沉积系统具有被配置为使用不同材料进行吹扫的分离部分和操作相同的方法
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Application No.: US10855851Application Date: 2004-05-27
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Publication No.: US20050011444A1Publication Date: 2005-01-20
- Inventor: Moon-sook Lee , Byoung-jae Bae
- Applicant: Moon-sook Lee , Byoung-jae Bae
- Priority: KR10-2003-0049204 20030718
- Main IPC: H01L21/205
- IPC: H01L21/205 ; C23C16/44 ; C23C16/455 ; C23C16/00
Abstract:
A vapor deposition system can include a first portion of the vapor deposition system that is configured to be purged using a first material and a second portion that is configured to be purged using a second material. Related methods are also disclosed.
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