发明申请
US20050012087A1 Self-aligned MOSFET having an oxide region below the channel
审中-公开
自对准MOSFET,其具有在沟道下方的氧化物区域
- 专利标题: Self-aligned MOSFET having an oxide region below the channel
- 专利标题(中): 自对准MOSFET,其具有在沟道下方的氧化物区域
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申请号: US10619828申请日: 2003-07-15
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公开(公告)号: US20050012087A1公开(公告)日: 2005-01-20
- 发明人: Yi-Ming Sheu , Chung-Cheng Wu
- 申请人: Yi-Ming Sheu , Chung-Cheng Wu
- 主分类号: H01L21/265
- IPC分类号: H01L21/265 ; H01L21/336 ; H01L21/762 ; H01L21/8238 ; H01L29/10 ; H01L29/78 ; H01L29/06
摘要:
A transistor device having a strained channel and a method for forming the transistor device are disclosed. The transistor device includes a semiconductor region having a top surface. The transistor device includes a source region, a drain region, and a channel region in the semiconductor region. The channel region is between the source region and the drain region. The transistor device includes an oxide region within the channel region and a gate overlying the channel region. The oxide region is laterally spaced from the source and drain regions. The transistor device includes a gate dielectric between the gate and the channel region.
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