发明申请
US20050012782A1 Inkjet head and a method of manufacturing the same 失效
喷墨头及其制造方法

Inkjet head and a method of manufacturing the same
摘要:
The disclosure is concerned with an inkjet head comprising; a chamber substrate for forming an ink flow passage; a diaphragm substrate including a diaphragm for pressurizing a pressure chamber disposed in the chamber substrate; and a nozzle substrate for jetting ink pressurized by the diaphragm, wherein the diaphragm substrate is made of silicon, the diaphragm is made of a material selected from the group of silicon oxide film and metal film, and the diaphragm is formed in the diaphragm substrate. The disclosure is also directed to a method of manufacturing the inkjet head.
公开/授权文献
信息查询
0/0