发明申请
- 专利标题: Inkjet head and a method of manufacturing the same
- 专利标题(中): 喷墨头及其制造方法
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申请号: US10890261申请日: 2004-07-14
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公开(公告)号: US20050012782A1公开(公告)日: 2005-01-20
- 发明人: Yasuhiro Yoshimura , Jun Nagata , Osamu Machida , Tatsuya Nagata
- 申请人: Yasuhiro Yoshimura , Jun Nagata , Osamu Machida , Tatsuya Nagata
- 专利权人: HITACHI, LTD.,HITACHI PRINTING SOLUTIONS, LTD.
- 当前专利权人: HITACHI, LTD.,HITACHI PRINTING SOLUTIONS, LTD.
- 优先权: JP2003-196215 20030714
- 主分类号: B41J2/16
- IPC分类号: B41J2/16 ; B41J2/045 ; B41J2/055 ; B41J2/14 ; B41J2/04
摘要:
The disclosure is concerned with an inkjet head comprising; a chamber substrate for forming an ink flow passage; a diaphragm substrate including a diaphragm for pressurizing a pressure chamber disposed in the chamber substrate; and a nozzle substrate for jetting ink pressurized by the diaphragm, wherein the diaphragm substrate is made of silicon, the diaphragm is made of a material selected from the group of silicon oxide film and metal film, and the diaphragm is formed in the diaphragm substrate. The disclosure is also directed to a method of manufacturing the inkjet head.
公开/授权文献
- US07226150B2 Inkjet head and a method of manufacturing the same 公开/授权日:2007-06-05
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