- 专利标题： Microstructure with movable mass
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申请号： US10488490申请日： 2002-09-02
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公开(公告)号： US20050016271A1公开(公告)日： 2005-01-27
- 发明人: Hiroyuki Hashimoto , Takahiko Ooasa , Naoki Ikeuchi , Muneo Harada
- 申请人： Hiroyuki Hashimoto , Takahiko Ooasa , Naoki Ikeuchi , Muneo Harada
- 优先权： JP2001-266604 20010904; JP2002-244282 20020823; JP2002-244283 20020823
- 国际申请： PCT/JP02/08879 WO 20020902
- 主分类号： B81B3/00
- IPC分类号： B81B3/00 ; B81B7/00 ; G01C19/56 ; G01C19/5719 ; G01P15/08 ; G01P15/12 ; G01P15/18 ; H01L49/00
摘要：
A microstructure includes a mass; a base member in which the mass is movably contained. The mass includes a surface, which is exposed out of the base member, and a stopper wire, which is arranged above the surface of the mass so as to inhibit over move of the mass.
公开/授权文献
- US06931928B2 Microstructure with movable mass 公开/授权日：2005-08-23