Acceleration sensor and inclination-detecting method
    3.
    发明申请
    Acceleration sensor and inclination-detecting method 失效
    加速度传感器和倾角检测方法

    公开(公告)号:US20060162450A1

    公开(公告)日:2006-07-27

    申请号:US10545088

    申请日:2004-02-10

    IPC分类号: G01P3/00

    摘要: In an acceleration sensor detecting inclined displacement of a predetermined article from a basic position, the acceleration sensor (10) includes a sensor chip having a detection plane including one detection axis or two crossing detection axes detecting the inclined displacement. An axis orthogonal to the detection plane of the sensor chip is disposed in parallel with a standard plane of the article in the basic position. Then, the sensor chip obtains an output signal according to the inclined displacement of the standard plane.

    摘要翻译: 在加速度传感器检测预定物品从基本位置的倾斜位移时,加速度传感器(10)包括具有检测平面的传感器芯片,检测平面包括一个检测轴或检测倾斜位移的两个检测轴。 与传感器芯片的检测平面垂直的轴与基本位置的物品的标准平面平行设置。 然后,传感器芯片根据标准平面的倾斜位移获得输出信号。

    Acceleration sensor and inclination-detecting method
    4.
    发明授权
    Acceleration sensor and inclination-detecting method 失效
    加速度传感器和倾角检测方法

    公开(公告)号:US07428841B2

    公开(公告)日:2008-09-30

    申请号:US10545088

    申请日:2004-02-10

    IPC分类号: G01P3/00 G01P1/02

    摘要: In an acceleration sensor detecting inclined displacement of a predetermined article from a basic position, the acceleration sensor (10) includes a sensor chip having a detection plane including one detection axis or two crossing detection axes detecting the inclined displacement. An axis orthogonal to the detection plane of the sensor chip is disposed in parallel with a standard plane of the article in the basic position. Then, the sensor chip obtains an output signal according to the inclined displacement of the standard plane.

    摘要翻译: 在加速度传感器检测预定物品从基本位置的倾斜位移时,加速度传感器(10)包括具有检测平面的传感器芯片,检测平面包括一个检测轴或检测倾斜位移的两个检测轴。 与传感器芯片的检测平面垂直的轴与基本位置的物品的标准平面平行设置。 然后,传感器芯片根据标准平面的倾斜位移获得输出信号。

    Vibration wave detector
    5.
    发明授权
    Vibration wave detector 失效
    振动波探测器

    公开(公告)号:US06438243B1

    公开(公告)日:2002-08-20

    申请号:US09085047

    申请日:1998-05-27

    IPC分类号: H04R2500

    CPC分类号: H04R15/02

    摘要: A vibration wave detector having a first diaphragm for receiving vibration waves, such as sound waves and so on, to be propagated in a medium, a resonant unit having a plurality of cantilever resonators each having such a length as to resonate at an individual predetermined frequency, a retaining rod for retaining the resonant unit, a second diaphragm positioned on the opposite side of the first diaphragm with respect to the retaining rod, and a vibration intensity detector for detecting the vibration intensity, for each predetermined frequency, of each of the resonators, by the vibration waves received by the first diaphragm and propagated to the resonant unit through the retaining rod.

    摘要翻译: 一种振动波检测器,具有用于接收诸如声波等的振动波在介质中传播的第一振动膜,具有多个悬臂谐振器的谐振单元,每个悬臂谐振器具有以各个预定频率谐振的长度 ,用于保持谐振单元的保持杆,相对于保持杆定位在第一隔膜相对侧的第二隔膜,以及用于检测每个谐振器的每个预定频率的振动强度的振动强度检测器 通过由第一隔膜接收的振动波并通过保持杆传播到谐振单元。

    Vibration wave detecting method and vibration wave detector
    6.
    发明授权
    Vibration wave detecting method and vibration wave detector 失效
    振动波检测方法和振动波检测器

    公开(公告)号:US06223601B1

    公开(公告)日:2001-05-01

    申请号:US09316833

    申请日:1999-05-21

    IPC分类号: G01H1100

    CPC分类号: G01H1/14 G01H11/06

    摘要: A vibration wave detector in which: a plurality of resonator beams, each having a different length and being allowed to resonate at a specific frequency, are provided; a piezoresistor is installed in each resonator beam; and the piezoresistors are parallel-connected so that vibration is converted to an electric signal by the piezoresistors so as to output the sum of vibration waveforms at the respective resonator beams. Utilizing the fact that the magnitude of strain is different depending on positions on the resonator beam, the installation position of the piezoresistor is adjusted on each of the resonator beams so as to set the level of an output signal from each frequency band at a desired level; thus, it becomes possible to control the gain of a specific frequency band.

    摘要翻译: 一种振动波检测器,其特征在于:提供多个具有不同长度并被允许以特定频率谐振的谐振器束; 每个谐振器梁中安装一个压敏电阻; 并且压电电阻器并联连接,从而通过压阻电阻器将振动转换成电信号,以输出各个谐振器波束的振动波形之和。 利用根据谐振器梁上的位置的应变幅度不同的事实,在每个谐振器波束上调整压敏电阻的安装位置,以便将来自每个频带的输出信号的电平设定在所需的电平 ; 因此,可以控制特定频带的增益。

    Displacement Measurement apparatus for microstructure and displcement measurement method thereof
    8.
    发明申请
    Displacement Measurement apparatus for microstructure and displcement measurement method thereof 有权
    位移测量装置的微结构和位移测量方法

    公开(公告)号:US20090145230A1

    公开(公告)日:2009-06-11

    申请号:US12315742

    申请日:2008-12-05

    IPC分类号: G01P15/125 G06F15/00

    摘要: A displacement measurement apparatus for a microstructure according to the present invention measures a displacement of the microstructure having a fixed portion electrode including a first electrode and a second electrode and a movable portion electrode located oppositely to the fixed portion electrode. A bias generating circuit applies a bias signal to between the first electrode and the movable portion electrode so that influence of a noise signal on a detection signal picked up from between the second electrode and the movable portion electrode may be reduced. A C/V converting circuit converts a capacitance change that is picked up from between the second electrode and the movable portion electrode into a voltage. A detecting circuit detects a displacement of the movable portion electrode based on the voltage.

    摘要翻译: 根据本发明的用于微结构的位移测量装置测量具有包括第一电极和第二电极的固定部分电极和位于与固定部分电极相对的可动部电极的微结构的位移。 偏置产生电路将偏置信号施加到第一电极和可动部分电极之间,从而可以减少噪声信号对从第二电极和可动部分电极之间拾取的检测信号的影响。 C / V转换电路将从第二电极和可动部分电极之间拾取的电容变化转换为电压。 检测电路基于电压检测可动部分电极的位移。

    Minute structure inspection device, inspection method, and inspection program
    9.
    发明申请
    Minute structure inspection device, inspection method, and inspection program 审中-公开
    分体结构检查装置,检验方法和检验程序

    公开(公告)号:US20080223136A1

    公开(公告)日:2008-09-18

    申请号:US12012729

    申请日:2008-02-04

    IPC分类号: G01N29/00

    摘要: There are provided an inspection device, an inspection method, and an inspection program for accurately inspecting a minute structure having a movable portion by using a simple method. A test sound wave is inputted and frequency characteristic of a sensor output voltage amplitude responding to the input of the test sound wave is analyzed. The maximum frequency and the minimum frequency of the device is calculated from estimated use conditions and it is judged whether it is possible to detect a desired characteristic in the frequency band. More specifically, the device is judged to be good or bad depending whether the response characteristic in a predetermined frequency band exceeds the minimum characteristic level as a threshold value.

    摘要翻译: 提供了一种检查装置,检查方法和检查程序,用于通过简单的方法精确地检查具有可移动部分的微小结构。 输入测试声波,分析响应于测试声波的输入的传感器输出电压幅度的频率特性。 从估计使用条件计算设备的最大频率和最小频率,并且判断是否可以检测到频带中的期望特性。 更具体地,根据预定频带中的响应特性是否超过最小特征电平作为阈值,判断装置是好还是坏。