- 专利标题： Image sensor having micro-lens array separated with trench structures and method of making
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申请号： US10918021申请日： 2004-08-13
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公开(公告)号： US20050017278A1公开(公告)日： 2005-01-27
- 发明人: Katsumi Yamamoto
- 申请人： Katsumi Yamamoto
- 主分类号： G02B1/04
- IPC分类号： G02B1/04 ; G02B3/00 ; G02B5/20 ; G02B27/10 ; G02F1/1335 ; H01L21/00 ; H01L27/146 ; H01L31/0232 ; H01L31/062 ; H01L31/113 ; H04N1/028 ; H04N5/369
摘要：
An image sensor having micro-lenses is disclosed. The image sensor comprises a plurality of pixels formed in a semiconductor substrate, each pixel including a light sensitive element. A micro-lens is formed over each of the light sensitive elements. Finally, a trench structure surrounds each of the micro-lenses.
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