Invention Application
- Patent Title: Ionisation vacuum gauge
- Patent Title (中): 电离真空计
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Application No.: US10910104Application Date: 2004-08-03
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Publication No.: US20050028602A1Publication Date: 2005-02-10
- Inventor: Raffaele Correale
- Applicant: Raffaele Correale
- Priority: ITTO2003A000627 20030808
- Main IPC: G01L21/34
- IPC: G01L21/34 ; H01J41/06 ; H01J41/10 ; H01J1/62

Abstract:
An ionisation vacuum gauge for measuring the residual pressure of a gaseous material remaining in a container (10), more particularly after operation of a vacuum pump comprises an electron-emitting cathode (31) made by exploiting the nanotube technology, a grid (13; 33; 133; 133′) for accelerating the electrons emitted by the cathode, and a plate (15; 35) collecting the ions and/or the ionised positive molecules of the gas. Measuring the plate current by a galvanometer allows for determining the value of the residual pressure inside the container.
Public/Granted literature
- US07049823B2 Ionization vacuum gauge Public/Granted day:2006-05-23
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