- 专利标题: Rotating gripper wafer flipper
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申请号: US10930488申请日: 2004-08-31
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公开(公告)号: US20050030008A1公开(公告)日: 2005-02-10
- 发明人: Willard Hofer , Shawn Davis , Joe Phillips
- 申请人: Willard Hofer , Shawn Davis , Joe Phillips
- 主分类号: B25J15/00
- IPC分类号: B25J15/00 ; H01L21/66 ; H01L21/687 ; G01R1/00
摘要:
A method for inspecting semiconductor wafers. Specifically, an arm which is constructed to hold a wafer, is mounted on a rotational device to provide a user with the means of inspecting a wafer in any position without having to physically touch the wafer or move the wafer to another inspection station. The arm provides rotation about an axis parallel to the surface of the wafer, as well as rotation about an axis run which is perpendicular to the surface of the wafer and extends through the axial center of the wafer.
公开/授权文献
- US06937005B2 Rotating gripper wafer flipper 公开/授权日:2005-08-30
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