Rotating gripper wafer flipper
    1.
    发明申请
    Rotating gripper wafer flipper 审中-公开
    旋转夹具晶圆片

    公开(公告)号:US20060046376A1

    公开(公告)日:2006-03-02

    申请号:US11210059

    申请日:2005-08-23

    IPC分类号: H01L21/8238

    CPC分类号: H01L21/68707

    摘要: A wafer-handling apparatus for semiconductor wafers, the apparatus including a holding structure having wedge assemblies configured to hold and rotate a wafer about a first axis, the first axis extending generally perpendicular to a surface of the wafer. Further, a shaft is operatively coupled to the holding structure and configured to rotate the holding structure about a second axis, the second axis different than the first axis.

    摘要翻译: 一种用于半导体晶片的晶片处理装置,该装置包括具有楔形组件的保持结构,该楔形组件构造成围绕第一轴线保持和旋转晶片,第一轴线大致垂直于晶片的表面延伸。 此外,轴可操作地联接到保持结构并且构造成围绕第二轴线旋转保持结构,第二轴线不同于第一轴线。

    Rotating gripper wafer flipper
    2.
    发明申请
    Rotating gripper wafer flipper 失效
    旋转夹具晶圆片

    公开(公告)号:US20050026324A1

    公开(公告)日:2005-02-03

    申请号:US10930582

    申请日:2004-08-31

    摘要: A method for fabricating semiconductor wafers. Specifically, an arm which is constructed to hold a wafer, is mounted on a rotational device to provide a user with the means of inspecting a wafer in any position without having to physically touch the wafer or move the wafer to another inspection station. The arm provides rotation about an axis parallel to the surface of the wafer, as well as rotation about an axis run which is perpendicular to the surface of the wafer and extends through the axial center of the wafer.

    摘要翻译: 一种制造半导体晶片的方法。 具体地,构造成保持晶片的臂被安装在旋转装置上,以向用户提供在任何位置检查晶片的装置,而不必物理地接触晶片或将晶片移动到另一个检查台。 臂提供围绕平行于晶片表面的轴的旋转,以及围绕垂直于晶片表面并延伸穿过晶片的轴向中心的轴线的旋转。