Invention Application
- Patent Title: Method for manufacturing a bipolar transistor
- Patent Title (中): 制造双极晶体管的方法
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Application No.: US10838860Application Date: 2004-05-03
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Publication No.: US20050037586A1Publication Date: 2005-02-17
- Inventor: Michel Marty , Bertrand Martinet , Cyril Fellous
- Applicant: Michel Marty , Bertrand Martinet , Cyril Fellous
- Assignee: STMicroelectronics S.A
- Current Assignee: STMicroelectronics S.A
- Priority: FR03/05419 20030502
- Main IPC: H01L21/331
- IPC: H01L21/331 ; H01L27/10

Abstract:
A method for manufacturing a bipolar transistor, comprising the steps of: growing on the substrate a first semiconductor; depositing an encapsulation layer etchable with respect to the first semiconductor, forming a sacrificial block at the location of the base-emitter junction; exposing the first semiconductor around spacers formed around said block; forming a second semiconductor, then a third semiconductor etchable with respect to the second semiconductor layer, the encapsulation layer, and the spacers, the sum of the thicknesses of the second semiconductor and the sacrificial layer being substantially equal to the sum of the thicknesses of the encapsulation layer and of the sacrificial block; removing the block and the encapsulation layer; depositing a fourth semiconductor; removing the third semiconductor; and etching an insulating layer to maintain it on the emitter walls and between said emitter and the second semiconductor.
Public/Granted literature
- US07115465B2 Method for manufacturing a bipolar transistor Public/Granted day:2006-10-03
Information query
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