发明申请
US20050039675A1 Spin coating apparatus and coated substrate manufactured using the same
审中-公开
旋涂装置和使用其制造的涂布基板
- 专利标题： Spin coating apparatus and coated substrate manufactured using the same
- 专利标题（中）： 旋涂装置和使用其制造的涂布基板
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申请号： US10921145申请日： 2004-08-19
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公开(公告)号： US20050039675A1公开(公告)日： 2005-02-24
- 发明人: Tae Kang , Mi Han , Seongkeun Lee , Sung Jang , Youngjun Hong
- 申请人： Tae Kang , Mi Han , Seongkeun Lee , Sung Jang , Youngjun Hong
- 优先权： KR2003-58133 20030822; KR2004-65148 20040818
- 主分类号： G11B7/26
- IPC分类号： G11B7/26 ; H01L21/00 ; H01L21/687 ; B05C11/02 ; B05C13/00
摘要：
A spin coating apparatus is provided. The spin coating apparatus includes a ring-shaped or polygonal member. An upper portion of the ring-shaped or polygonal member has an inclined portion extending downward and outward, and an inner portion of the inclined portion is adjacent to or in contact with an outer edge of a substrate. An inner side surface of the ring-shaped or polygonal member is inclined downward and outward. When a surface of the substrate is coated with a coating solution using the spin coating apparatus, a ski-jump phenomenon occurring at an outer edge of the substrate can be reduced and contamination of the substrate due to the coating solution can be prevented.
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