Invention Application
- Patent Title: Control system for a sputtering system
- Patent Title (中): 溅射系统控制系统
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Application No.: US10642505Application Date: 2003-08-18
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Publication No.: US20050040794A1Publication Date: 2005-02-24
- Inventor: Mark Tracy , Jesse Klein
- Applicant: Mark Tracy , Jesse Klein
- Main IPC: C23C14/54
- IPC: C23C14/54 ; H01J37/32 ; H01J37/34 ; H01L21/00 ; H02P9/00
Abstract:
A fault handling algorithm processes a plurality of fault status signals from a sputtering system in a period of time to generate at least one command signal for affecting the operation of a power generator.
Public/Granted literature
- US06995545B2 Control system for a sputtering system Public/Granted day:2006-02-07
Information query
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