- 专利标题: Dynamic random access memory cell layout and fabrication method thereof
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申请号: US10761985申请日: 2004-01-21
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公开(公告)号: US20050045936A1公开(公告)日: 2005-03-03
- 发明人: Ming-Cheng Chang , Tieh-Chiang Wu , Yi-Nan Chen , Jeng-Ping Lin
- 申请人: Ming-Cheng Chang , Tieh-Chiang Wu , Yi-Nan Chen , Jeng-Ping Lin
- 优先权: TW92124187 20030902
- 主分类号: H01L21/334
- IPC分类号: H01L21/334 ; H01L21/8242 ; H01L27/108
摘要:
A dynamic random access memory (DRAM) cell layout for arranging deep trenches and active areas and a fabrication method thereof. An active area comprises two vertical transistors, a common bitline contact and two deep trenches. The first vertical transistor is formed on a region where the first deep trench is partially overlapped with the first gate conductive line. The second vertical transistor is formed on a region where the second deep trench is partially overlapped with the second gate conductive line.
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