发明申请
- 专利标题: Hybrid mirror VCSEL
- 专利标题(中): 混合镜VCSEL
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申请号: US10933876申请日: 2004-09-03
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公开(公告)号: US20050047474A1公开(公告)日: 2005-03-03
- 发明人: Ralph Johnson , Tzu-Yu Wang
- 申请人: Ralph Johnson , Tzu-Yu Wang
- 专利权人: Finisar
- 当前专利权人: Finisar
- 主分类号: H01S3/08
- IPC分类号: H01S3/08 ; H01S5/00 ; H01S5/042 ; H01S5/183 ; H01S5/20
摘要:
The invention is generally concerned with vertical cavity surface emitting lasers. In one example, the vertical cavity surface emitting laser includes, among other things, an upper mirror structure having a metal contact, a top mirror above the metal contact, and a semiconductive top DBR having an insulation region, wherein the top DBR is no more than 3.5 microns thick and is disposed below the metal contact. Thus, the top DBR is sufficiently thick as to enable adequate current spreading, but thin enough to enable fabrication of an isolation region using relatively low energy ion implantation or relatively shallow etching.
公开/授权文献
- US07110427B2 Hybrid mirror VCSEL 公开/授权日:2006-09-19
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