- 专利标题: Method for generating a protective cover for a device
-
申请号: US10888568申请日: 2004-07-09
-
公开(公告)号: US20050048757A1公开(公告)日: 2005-03-03
- 发明人: Robert Aigner , Martin Franosch , Andreas Meckes , Klaus-Gunter Oppermann , Marc Strasser
- 申请人: Robert Aigner , Martin Franosch , Andreas Meckes , Klaus-Gunter Oppermann , Marc Strasser
- 申请人地址: DE Munchen
- 专利权人: Infineon Technologies AG
- 当前专利权人: Infineon Technologies AG
- 当前专利权人地址: DE Munchen
- 优先权: DE10200869.8 20020111
- 主分类号: B81B7/00
- IPC分类号: B81B7/00 ; B81C1/00 ; H03H3/02 ; H01L21/44
摘要:
In a method for generating a protective cover for a device, where a substrate is provided, which comprises the device, first, a sacrificial pattern is generated on the substrate. The sacrificial pattern covers at least an area of the substrate, which comprises the device. Then, a polymer layer is deposited, which comprises at least on sacrificial pattern. Then, an opening will be formed in the polymer layer to expose a portion of the sacrificial pattern. Then, the sacrificial pattern will be removed and the formed opening in the polymer layer is closed.
公开/授权文献
- US06955950B2 Method for generating a protective cover for a device 公开/授权日:2005-10-18
信息查询