发明申请
- 专利标题： Micro-machining employing multiple independently focused and independently steered beams
- 专利标题（中）： 采用多个独立聚焦和独立转向梁的微加工
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申请号： US10742838申请日： 2003-12-23
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公开(公告)号： US20050056627A1公开(公告)日： 2005-03-17
- 发明人: Abraham Gross , Zvi Kotler , Eliezer Lipman , Dan Alon
- 申请人： Abraham Gross , Zvi Kotler , Eliezer Lipman , Dan Alon
- 专利权人： ORBOTECH LTD
- 当前专利权人： ORBOTECH LTD
- 主分类号： G02B26/10
- IPC分类号： G02B26/10 ; B23K26/067 ; B23K26/08 ; B23K26/38 ; B23K101/42 ; G02F1/31 ; H01S3/00 ; H05K3/00
摘要：
A system for delivering energy to a substrate includes a laser energy source providing at least two laser beams, wherein each of the beams is steered to an independently selectable location on a target, and is independently focused onto the target.