发明申请
US20050058948A1 Systems and methods for mastering microstructures through a substrate using negative photoresist and microstructure masters so produced 有权
通过使用负性光致抗蚀剂和如此生产的微结构主体的基板来掌握微结构的系统和方法

Systems and methods for mastering microstructures through a substrate using negative photoresist and microstructure masters so produced
摘要:
Microstructures are fabricated by impinging a radiation beam, such as a laser beam, through a substrate that is transparent to the laser beam, into a negative photoresist layer on the substrate. The negative photoresist layer may be subsequently developed to provide a master for optical and/or mechanical microstructures. Related systems, microstructure products and microstructure masters also are disclosed.
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