Invention Application
- Patent Title: Method of fabricating thin film transistor TFT array
- Patent Title (中): 制造薄膜晶体管TFT阵列的方法
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Application No.: US10673325Application Date: 2003-09-30
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Publication No.: US20050059190A1Publication Date: 2005-03-17
- Inventor: Chi-Shen Lee , Cheng-Chung Chen , Chi-Lin Chen , Chai-Yuan Sheu
- Applicant: Chi-Shen Lee , Cheng-Chung Chen , Chi-Lin Chen , Chai-Yuan Sheu
- Applicant Address: TW Hsinchu
- Assignee: Industrial Technology Research Institute
- Current Assignee: Industrial Technology Research Institute
- Current Assignee Address: TW Hsinchu
- Priority: TW092125528 20030916
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L21/00 ; H01L21/336 ; H01L21/77 ; H01L21/84 ; H01L27/12 ; H01L27/13 ; H01L29/417 ; H01L29/49 ; H01L29/786

Abstract:
A method of fabricating thin film transistor TFT array discloses ions of desired-plated metal and the graphs of the desired-plated area are made by oxidation-reduction materials processes ion replacement for implementing the metal wiring layout of the TFT-LCDs. This, therefore, can overcome the problem of uneasy metal etching thereto achieves the purpose of an automatic alignment. The method uses the ability of the oxidation-reduction reaction to implement the replacement for alternating the lithography etching process in the metal wiring layout as presented in the traditional technique.
Public/Granted literature
- US07060541B2 Method of fabricating thin film transistor TFT array Public/Granted day:2006-06-13
Information query
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