发明申请
- 专利标题: Novel lactone compounds
- 专利标题(中): 新型内酯化合物
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申请号: US10899965申请日: 2004-07-26
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公开(公告)号: US20050059830A1公开(公告)日: 2005-03-17
- 发明人: Tomoya Sawaki , Hiroyuki Kenmochi , Yoji Hori
- 申请人: Tomoya Sawaki , Hiroyuki Kenmochi , Yoji Hori
- 申请人地址: JP Tokyo
- 专利权人: TAKASAGO INTERNATIONAL CORPORATION
- 当前专利权人: TAKASAGO INTERNATIONAL CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP2003-279613 20030725
- 主分类号: C07D307/93
- IPC分类号: C07D307/93 ; C07D307/00
摘要:
An object of the present invention is to provide a novel monomer compound having a lactone structure which gives polymers having more excellent feature as resist material, etc. The present invention relates to a compound represented by the following formula [1]: wherein R1 and R2 are an alkyl group; R3 and R4 are each independently hydrogen atom or an alkyl group; R5 is hydrogen atom, acryloyl group or methacryloyl group; and X is a methylene group which may have an alkyl group or an ethylene group which may have an alkyl group. The present invention provides a compound having a lactone structure which gives a polymer having more excellent feature particularly as a resist material and also provides a hydroxy lactone being useful as a material, etc. therefor.
公开/授权文献
- US07105684B2 Lactone compounds 公开/授权日:2006-09-12
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