发明申请
US20050074088A1 X-ray inspection apparatus and X-ray inspection method 失效
X射线检查仪和X射线检查方法

X-ray inspection apparatus and X-ray inspection method
摘要:
The X-ray inspection device and the X-ray inspection method according to the present invention are configured to hold an object to be inspected irradiated with an X-ray from an X-ray irradiation device, uses a swinging device for performing swinging motion of tilting the object to be inspected at an arbitrary angle and in an arbitrary direction, images the X-ray that passes through the object to be inspected in an X-ray detection device and extracts data of a desired cross section from the X-ray image of the X-ray detection device in a control device.
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