发明申请
- 专利标题: Method for manufacturing optical disk master and method for manufacturing optical disk
- 专利标题(中): 光盘主机的制造方法及其制造方法
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申请号: US10409487申请日: 2003-04-08
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公开(公告)号: US20050074701A1公开(公告)日: 2005-04-07
- 发明人: Masahiko Tsukuda , Shinya Abe , Eiichi Ito , Morio Tomiyama
- 申请人: Masahiko Tsukuda , Shinya Abe , Eiichi Ito , Morio Tomiyama
- 申请人地址: JP Kadoma-shi
- 专利权人: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
- 当前专利权人: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
- 当前专利权人地址: JP Kadoma-shi
- 优先权: JP2002-106169 20020409; JP2002-200518 20020709
- 主分类号: G03F7/20
- IPC分类号: G03F7/20 ; B29D17/00 ; G11B7/0045 ; G11B7/125 ; G11B7/24 ; G11B7/26
摘要:
A method for manufacturing an optical disk master includes: forming a resist layer by the application of a chemically amplified resist; converting an information signal into a multipulse signal having a symmetrical shape; exposing the resist layer in accordance with the multipulse signal; heat-treating the resist layer; and developing the resist layer to form signal pits. The signal pits are exposed to the multipulse signal, which is obtained by dividing a pulse into symmetrical pulses, thereby adjusting the exposure area and achieving a desired pit shape.
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