发明申请
- 专利标题: Vacuum control system
- 专利标题(中): 真空控制系统
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申请号: US10813558申请日: 2004-03-29
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公开(公告)号: US20050079074A1公开(公告)日: 2005-04-14
- 发明人: Yoshio Ishii , Koji Tanemura , Toshihiko Matsumoto , Kozo Shirato
- 申请人: Yoshio Ishii , Koji Tanemura , Toshihiko Matsumoto , Kozo Shirato
- 申请人地址: JP Saitama
- 专利权人: ERC, Inc.
- 当前专利权人: ERC, Inc.
- 当前专利权人地址: JP Saitama
- 优先权: JP2003-352286 20031010
- 主分类号: F04B49/06
- IPC分类号: F04B49/06 ; A61M1/00 ; B01D19/00 ; B01D61/00 ; F04B37/14 ; G05D16/04 ; G05D16/20 ; C21C7/10 ; F04B17/00
摘要:
There is provided a vacuum control system for allowing the degree of vacuum in a vacuum vessel to be kept constant, effectively and accurately removing vaporized components degassed into the vacuum vessel through a gas permeation diaphragm by stably introducing a very small amount of air into a vacuum exhaust path, and thus operating stably, and a vacuum degassing apparatus employing the vacuum control system. The vacuum control system controls the rotatory power of a DC brushless motor, continuously controls displacement of a vacuum pump, and thus keeps the degree of vacuum in a vacuum vessel constant, by decompressing the inside of the vacuum vessel using an exhaust vacuum pump which operates with the DC brushless motor, monitoring the inside pressure of the vacuum vessel using a pressure sensor, and controlling a voltage applied to the DC brushless motor on the basis of an output signal resulting from measurement of the inside pressure of the vacuum vessel by the pressure sensor.
公开/授权文献
- US07686590B2 Vacuum control system 公开/授权日:2010-03-30
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