Invention Application
- Patent Title: Variable rotational assignment of interconnect levels in integrated circuit fabrication
- Patent Title (中): 集成电路制造中互连电平的可变旋转分配
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Application No.: US11002608Application Date: 2004-12-02
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Publication No.: US20050079654A1Publication Date: 2005-04-14
- Inventor: Thaddeus Gabara , Tarek Jomaa
- Applicant: Thaddeus Gabara , Tarek Jomaa
- Assignee: Lucent Technologies Inc.
- Current Assignee: Lucent Technologies Inc.
- Main IPC: G03F1/08
- IPC: G03F1/08 ; G06F17/50 ; H01L21/027 ; H01L21/3205 ; H01L21/768 ; H01L21/82 ; H01L23/52 ; H01L23/528 ; H01L21/44

Abstract:
Integrated circuit fabrication techniques are provided which allow non-horizontal/non-vertical wires to traverse the entire chip surface, rather than just the comers as in the conventional Manhattan geometry, while interconnecting circuit points. This is achieved by employing a variable rotational assignment methodology with respect to the interconnect layers or levels during the IC fabrication operation. These techniques thus eliminate the litho step problem, reduce interconnect distances and lessen the influence of capacitance interaction between interconnect wires.
Public/Granted literature
- US07042079B2 Variable rotational assignment of interconnect levels in integrated circuit fabrication Public/Granted day:2006-05-09
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