发明申请
- 专利标题： Defect reduction using pad conditioner cleaning
- 专利标题（中）： 缺陷减少使用垫调节剂清洁
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申请号： US10681099申请日： 2003-10-09
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公开(公告)号： US20050079811A1公开(公告)日： 2005-04-14
- 发明人: Chi-Feng Cheng
- 申请人： Chi-Feng Cheng
- 专利权人： Macronix International Co., Ltd.
- 当前专利权人： Macronix International Co., Ltd.
- 主分类号： B24B37/04
- IPC分类号： B24B37/04 ; B24B53/007 ; B24B1/00
摘要：
A device for cleaning a pad conditioner that comprises a cleaning agent supply for providing a cleaning agent for cleaning a pad conditioner including a conditioning surface, a pad including an abrasive surface, and a pump rotating the pad with respect to the pad conditioner for rubbing the abrasive surface of the pad against the conditioning surface of the pad conditioner.
信息查询
