发明申请
- 专利标题: Laser beam machine
- 专利标题(中): 激光束机
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申请号: US10961219申请日: 2004-10-12
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公开(公告)号: US20050082264A1公开(公告)日: 2005-04-21
- 发明人: Yusuke Nagai , Satoshi Kobayashi , Yukio Morishige , Masaru Nakamura , Masahiro Murata
- 申请人: Yusuke Nagai , Satoshi Kobayashi , Yukio Morishige , Masaru Nakamura , Masahiro Murata
- 优先权: JP2003-355297 20031015
- 主分类号: B23K26/00
- IPC分类号: B23K26/00 ; B23K26/03 ; B23K101/40 ; H01L21/301
摘要:
A laser beam machine comprising a chuck table for holding a workpiece and a laser beam application means for applying a laser beam to the workpiece held on the chuck table, wherein the machine further comprises a light detection means for detecting light of a processing portion of the workpiece to which a laser beam is applied from the laser beam application means and a control means for judging whether the output value of the light detection means falls within a predetermined permissible range.
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