发明申请
- 专利标题: Apparatus for testing substrates
- 专利标题(中): 用于测试基板的装置
-
申请号: US10928975申请日: 2004-08-27
-
公开(公告)号: US20050083036A1公开(公告)日: 2005-04-21
- 发明人: Stefan Schneidewind , Claus Dietrich , Frank-Michael Werner , Don Feuerstein , Mike Lancaster , Denis Place
- 申请人: Stefan Schneidewind , Claus Dietrich , Frank-Michael Werner , Don Feuerstein , Mike Lancaster , Denis Place
- 优先权: DE10340006.4 20030828; DE102004013707.2 20030318
- 主分类号: H01L21/66
- IPC分类号: H01L21/66 ; G01R31/02 ; H01L21/00 ; H05K3/00
摘要:
An apparatus for testing substrates reduces the area required and the costs which arise with the testing of substrates, in particular semiconductor wafers, during the production process. The apparatus includes testing arrangements comprising a chuck, a chuck drive, control electronics, probe or probe board holding means with a handling system, a substrate magazine station and an alignment station. The testing arrangements include at least two testing arrangements, both of which are all jointly operatively connected to the handling system, the substrate magazine station and the alignment station.
公开/授权文献
- US07196507B2 Apparatus for testing substrates 公开/授权日:2007-03-27