发明申请
US20050084792A1 Photoresist stripping solution and a method of stripping photoresists using the same
审中-公开
光阻剥离溶液和使用其剥离光致抗蚀剂的方法
- 专利标题: Photoresist stripping solution and a method of stripping photoresists using the same
- 专利标题(中): 光阻剥离溶液和使用其剥离光致抗蚀剂的方法
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申请号: US10973302申请日: 2004-10-27
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公开(公告)号: US20050084792A1公开(公告)日: 2005-04-21
- 发明人: Shigeru Yokoi , Kazumasa Wakiya
- 申请人: Shigeru Yokoi , Kazumasa Wakiya
- 优先权: JP2001-235884 20010803; JP2001-392290 20011225
- 主分类号: C23F11/00
- IPC分类号: C23F11/00 ; G03F7/42 ; H01L21/027 ; H01L21/304 ; H01L21/311 ; H01L21/3213 ; G03C11/12
摘要:
A photoresist stripping solution which comprises (a) a salt of hydrofluoric acid with a base free from metal ions, (b) a water-soluble organic solvent, (c) a mercapto group containing corrosion inhibitor, and (d) water, and a method of stripping photoresists with the use of the same are disclosed. In case of using ammonium fluoride as component (a), the photoresist stripping solution may further contain (e) a salt of hydrofluoric acid with a quaternary ammonium hydroxide, such as tetramethylammonium hydroxide, tetrapropylammonium hydroxide, etc., and/or an alkanolamine. The photoresist stripping solution of the present invention has an excellent effect of protecting both Al- and Cu-based metal wiring conductors from corrosion, of efficiently stripping photoresist films and post-ashing residues, and is free from the precipitation of the corrosion inhibitor.
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