Invention Application
- Patent Title: Inspection by a transmission electron microscope of a sample
- Patent Title (中): 通过透射电子显微镜检查样品
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Application No.: US10974953Application Date: 2004-10-28
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Publication No.: US20050087697A1Publication Date: 2005-04-28
- Inventor: Myoung-Rack Lee , Sun-Young Lee
- Applicant: Myoung-Rack Lee , Sun-Young Lee
- Priority: KR2003-75553 20031028
- Main IPC: H01L21/304
- IPC: H01L21/304 ; G01N1/28 ; G01N1/36 ; H01J37/20

Abstract:
A method of manufacturing a transmission electron microscope inspection sample. The sample is mounted into a recess in the mount and the sample is grinded to a preset target thickness. A recess for mounting the sample and a groove for separating the sample from the recess are formed on a top surface of the mount. The sample is fixed into the recess using mounting wax. The protruding portion of the sample protrudes above the mount and is grinded by the grinder. The depth of the recess is based on the target thickness of the sample. The protruding portion of the sample is grinded to the top surface of the mount.
Public/Granted literature
- US07038218B2 Inspection by a transmission electron microscope of a sample Public/Granted day:2006-05-02
Information query
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