发明申请
US20050088257A1 Manufacturing process for thin film bulk acoustic resonator (FBAR) filters
审中-公开
薄膜体声波谐振器（FBAR）滤波器的制造工艺
- 专利标题： Manufacturing process for thin film bulk acoustic resonator (FBAR) filters
- 专利标题（中）： 薄膜体声波谐振器（FBAR）滤波器的制造工艺
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申请号： US10994068申请日： 2004-11-18
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公开(公告)号： US20050088257A1公开(公告)日： 2005-04-28
- 发明人: Richard Ruby , John Larson , Paul Bradley
- 申请人： Richard Ruby , John Larson , Paul Bradley
- 主分类号： H03H3/02
- IPC分类号： H03H3/02 ; H03H3/04 ; H03H9/02 ; H03H9/58 ; H03H9/54
摘要：
Method for fabricating an acoustical resonator on a substrate having a top surface. First, a depression in said top surface is generated. Next, the depression is filled with a sacrificial material. The filled depression has an upper surface level with said top surface of said substrate. Next, a first electrode is deposited on said upper surface. Then, a layer of piezoelectric material is deposited on said first electrode. A second electrode is deposited on the layer of piezoelectric material using a mass load lift-off process.
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