发明申请
- 专利标题: Illumination system particularly for microlithography
- 专利标题(中): 照明系统特别适用于微光刻
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申请号: US10919583申请日: 2004-08-17
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公开(公告)号: US20050088760A1公开(公告)日: 2005-04-28
- 发明人: Hans-Juergen Mann , Wolfgang Singer , Joerg Schultz , Johannes Wangler , Karl-Heinz Schuster , Udo Dinger , Martin Antoni , Wilhelm Ulrich
- 申请人: Hans-Juergen Mann , Wolfgang Singer , Joerg Schultz , Johannes Wangler , Karl-Heinz Schuster , Udo Dinger , Martin Antoni , Wilhelm Ulrich
- 专利权人: Carl Zeiss SMT AG
- 当前专利权人: Carl Zeiss SMT AG
- 优先权: WOPCT/EP00/07258 20000728; DE29902108.4 19990208; DE19903807.4 19990202; DE19819898.1 19980505
- 主分类号: G02B17/06
- IPC分类号: G02B17/06 ; G03F7/20 ; G21K1/06 ; G21K5/00 ; G21K5/04 ; G02B17/00
摘要:
There is provided a projection objective for a projection exposure apparatus that has a primary light source for emitting electromagnetic radiation having a chief ray with a wavelength≦193 nm. The projection objective includes an object plane, a first mirror, a second mirror, a third mirror, a fourth mirror; and an image plane. The object plane, the first mirror, the second mirror, the third mirror, the fourth mirror and the image plane are arranged in a centered arrangement around a common optical axis. The first mirror, the second mirror, the third mirror, and the fourth mirror are situated between the object plane and the image plane. The chief ray, when incident on an object situated in the object plane, in a direction from the primary light source, is inclined away from the common optical axis.
公开/授权文献
- US07186983B2 Illumination system particularly for microlithography 公开/授权日:2007-03-06
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