Invention Application
- Patent Title: PVD transfer robot short blade
- Patent Title (中): PVD传送机器人短刀片
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Application No.: US10697975Application Date: 2003-10-31
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Publication No.: US20050092254A1Publication Date: 2005-05-05
- Inventor: Mark Davidson
- Applicant: Mark Davidson
- Applicant Address: US VA Sandston
- Assignee: Infineon Technologies Richmond, LP
- Current Assignee: Infineon Technologies Richmond, LP
- Current Assignee Address: US VA Sandston
- Main IPC: C23C14/50
- IPC: C23C14/50 ; H01L21/00 ; H01L21/68 ; C23C16/00
Abstract:
An apparatus including a first robot, a blade on the first robot, the blade including a pocket to receive a wafer and self-correct a positioning error of the wafer in the pocket, and a first chamber to receive the wafer from the blade and deposit a first metal on the received wafer.
Information query
IPC分类:
