发明申请
- 专利标题: Continuous dissolving device, continuous dissolving method, and gas-dissolved water supply
- 专利标题(中): 连续溶解装置,连续溶解法和气溶水供水
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申请号: US10507539申请日: 2003-03-18
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公开(公告)号: US20050093182A1公开(公告)日: 2005-05-05
- 发明人: Hiroshi Morita , Junichi Ida , Kazumi Tsukamoto
- 申请人: Hiroshi Morita , Junichi Ida , Kazumi Tsukamoto
- 申请人地址: JP SHINJUKU-KU, TOYKO 160-8383
- 专利权人: KURITA WATER INDUSTRIES LTD
- 当前专利权人: KURITA WATER INDUSTRIES LTD
- 当前专利权人地址: JP SHINJUKU-KU, TOYKO 160-8383
- 优先权: JP2002-142032 20020516
- 国际申请: PCT/JP03/03289 WO 20030318
- 主分类号: C02F1/00
- IPC分类号: C02F1/00 ; B01F1/00 ; B01F3/04 ; B01F3/08 ; B01F15/00 ; B01F15/04 ; C02F1/68 ; H01L21/304 ; B01D47/00
摘要:
An apparatus for continuous dissolution comprising a dissolution portion for dissolving a gas into a main stream liquid, which comprises a flow meter measuring the flow rate of the main stream liquid and outputting a signal of the value obtained by the measurement and a mechanism for controlling the flow rate which controls the amount of supply of the gas based on the input signal; and a process for continuously dissolving a gas into the main stream liquid, wherein the amount of the gas is controlled based on the flow rate of the main stream liquid. Since a solution having a constant concentration can be obtained with stability even when the flow rate of the main stream liquid changes, cleaning water or surface treatment water used for electronic materials which particularly require a precisely clean surface can be supplied without loss.
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