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US20050095479A1 Porous films and method of making the same 失效
多孔薄膜及其制作方法

Porous films and method of making the same
摘要:
A method for making a porous film includes the steps of forming a cermet film and/or a ceramic film by depositing or co-depositing suitable materials on a substrate, and causing metal in the material(s) to reduce and/or to diffuse to the cermet film surface and/or the ceramic film surface to render the porous film.
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