发明申请
- 专利标题: Micromechanical structural element having a diaphragm and method for producing such a structural element
- 专利标题(中): 具有隔膜的微机械结构元件及其制造方法
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申请号: US10970069申请日: 2004-10-19
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公开(公告)号: US20050098840A1公开(公告)日: 2005-05-12
- 发明人: Matthias Fuertsch , Stefan Pinter , Heribert Weber , Frank Fischer , Lars Metzger , Christoph Schelling , Frieder Sundermeier
- 申请人: Matthias Fuertsch , Stefan Pinter , Heribert Weber , Frank Fischer , Lars Metzger , Christoph Schelling , Frieder Sundermeier
- 优先权: DE10352001.5 20031107
- 主分类号: B81B3/00
- IPC分类号: B81B3/00 ; B81C1/00 ; H01L21/00 ; H01L27/14
摘要:
A micromechanical structural element, having a very stable diaphragm, implemented in a pure front process and in a layer construction on a substrate. The layer construction includes at least one sacrificial layer and one diaphragm layer above the sacrificial layer, which is structured for laying bare the diaphragm and generating stabilizing elements on the diaphragm, at least one recess being generated for a stabilizing element of the diaphragm. The structure generated in the sacrificial layer is then at least superficially closed with at least one material layer being deposited above the structured sacrificial layer, this material layer forming at least a part of the diaphragm layer and being structured to generate at least one etch hole for etching the sacrificial layer, which is removed from the region under the etch hole, the diaphragm and the at least one stabilizing element being laid bare, a cavity being created under the diaphragm.
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