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    Micromechanical structural element having a diaphragm and method for producing such a structural element
    1.
    发明申请
    Micromechanical structural element having a diaphragm and method for producing such a structural element 有权
    具有隔膜的微机械结构元件及其制造方法

    公开(公告)号：US20050098840A1

    公开(公告)日：2005-05-12

    申请号：US10970069

    申请日：2004-10-19

    申请人： Matthias Fuertsch ,  Stefan Pinter ,  Heribert Weber ,  Frank Fischer ,  Lars Metzger ,  Christoph Schelling ,  Frieder Sundermeier

    发明人： Matthias Fuertsch ,  Stefan Pinter ,  Heribert Weber ,  Frank Fischer ,  Lars Metzger ,  Christoph Schelling ,  Frieder Sundermeier

    IPC分类号： B81B3/00 ,  B81C1/00 ,  H01L21/00 ,  H01L27/14

    CPC分类号： B81B3/007 ,  B81B2201/0264 ,  B81B2203/0127 ,  B81C2201/0167

    摘要： A micromechanical structural element, having a very stable diaphragm, implemented in a pure front process and in a layer construction on a substrate. The layer construction includes at least one sacrificial layer and one diaphragm layer above the sacrificial layer, which is structured for laying bare the diaphragm and generating stabilizing elements on the diaphragm, at least one recess being generated for a stabilizing element of the diaphragm. The structure generated in the sacrificial layer is then at least superficially closed with at least one material layer being deposited above the structured sacrificial layer, this material layer forming at least a part of the diaphragm layer and being structured to generate at least one etch hole for etching the sacrificial layer, which is removed from the region under the etch hole, the diaphragm and the at least one stabilizing element being laid bare, a cavity being created under the diaphragm.

    摘要翻译： 具有非常稳定的隔膜的微机械结构元件以纯正的前工艺和基底上的层结构实现。 该层结构包括至少一个牺牲层和牺牲层上方的一个隔膜层，其被构造用于铺设隔膜并在隔膜上产生稳定元件，为隔膜的稳定元件产生至少一个凹槽。 然后在牺牲层中产生的结构至少被表面封闭，其中至少一个材料层沉积在结构化牺牲层的上方，该材料层形成隔膜层的至少一部分并被构造成产生至少一个蚀刻孔 蚀刻从蚀刻孔下方的区域去除的牺牲层，隔膜和至少一个稳定元件被裸露，在隔膜下面形成空腔。

    Micromechanical structural element having a diaphragm and method for producing such a structural element
    2.
    发明授权
    Micromechanical structural element having a diaphragm and method for producing such a structural element 有权
    具有隔膜的微机械结构元件及其制造方法

    公开(公告)号：US07148077B2

    公开(公告)日：2006-12-12

    申请号：US10970069

    申请日：2004-10-19

    申请人： Matthias Fuertsch ,  Stefan Pinter ,  Heribert Weber ,  Frank Fischer ,  Lars Metzger ,  Christoph Schelling ,  Frieder Sundermeier

    发明人： Matthias Fuertsch ,  Stefan Pinter ,  Heribert Weber ,  Frank Fischer ,  Lars Metzger ,  Christoph Schelling ,  Frieder Sundermeier

    IPC分类号： H01L21/00

    CPC分类号： B81B3/007 ,  B81B2201/0264 ,  B81B2203/0127 ,  B81C2201/0167

    摘要： A micromechanical structural element, having a very stable diaphragm, implemented in a pure front process and in a layer construction on a substrate. The layer construction includes at least one sacrificial layer and one diaphragm layer above the sacrificial layer, which is structured for laying bare the diaphragm and generating stabilizing elements on the diaphragm, at least one recess being generated for a stabilizing element of the diaphragm. The structure generated in the sacrificial layer is then at least superficially closed with at least one material layer being deposited above the structured sacrificial layer, this material layer forming at least a part of the diaphragm layer and being structured to generate at least one etch hole for etching the sacrificial layer, which is removed from the region under the etch hole, the diaphragm and the at least one stabilizing element being laid bare, a cavity being created under the diaphragm.

    摘要翻译： 具有非常稳定的隔膜的微机械结构元件以纯正的前工艺和基底上的层结构实现。 该层结构包括至少一个牺牲层和牺牲层上方的一个隔膜层，其被构造用于铺设隔膜并在隔膜上产生稳定元件，为隔膜的稳定元件产生至少一个凹槽。 然后在牺牲层中产生的结构至少被表面封闭，其中至少一个材料层沉积在结构化牺牲层的上方，该材料层形成隔膜层的至少一部分并被构造成产生至少一个蚀刻孔 蚀刻从蚀刻孔下方的区域去除的牺牲层，隔膜和至少一个稳定元件被裸露，在隔膜下面形成空腔。

    Micropump having a pump diaphragm and a polysilicon layer
    4.
    发明授权
    Micropump having a pump diaphragm and a polysilicon layer 失效
    微泵具有泵膜和多晶硅层

    公开(公告)号：US07740459B2

    公开(公告)日：2010-06-22

    申请号：US10564370

    申请日：2004-07-07

    申请人： Matthias Fuertsch ,  Hubert Benzel ,  Stefan Finkbeiner ,  Stefan Pinter ,  Frank Fischer ,  Heiko Stahl ,  Tjalf Pirk

    发明人： Matthias Fuertsch ,  Hubert Benzel ,  Stefan Finkbeiner ,  Stefan Pinter ,  Frank Fischer ,  Heiko Stahl ,  Tjalf Pirk

    IPC分类号： F04B17/03

    CPC分类号： F04B43/043

    摘要： A method for producing a micromechanical component, preferably for fluidic applications having cavities. The component is constructed from two functional layers, the two functional layers being patterned differently using micromechanical methods. A first etch stop layer having a first pattern is applied to a base plate. A first functional layer is applied to the first etch stop layer and to the first contact surfaces of the base plate. A second etch stop layer, having a second pattern, is applied to first functional layer. A second functional layer is applied to the second etch stop layer and to the second contact surfaces of the first functional layer. An etching mask is applied to the second functional layer. The second and the first functional layer are patterned as sacrificial layers by the use of the first and the second etch stop layer by etching methods and/or by using the first and the second etch stop layer. By supplementing patterning of the base plate, additional movable fluidic elements may be implemented, using the method. The method is preferably used for producing a micropump having an epitactic polysilicon layer as the pump diaphragm.

    摘要翻译： 用于制造微机械部件的方法，优选用于具有空腔的流体应用。 该组件由两个功能层构成，两个功能层使用微机械方法被不同地图案化。 将具有第一图案的第一蚀刻停止层施加到基板。 第一功能层被施加到第一蚀刻停止层和基板的第一接触表面。 具有第二图案的第二蚀刻停止层被施加到第一功能层。 第二功能层被施加到第二蚀刻停止层和第一功能层的第二接触表面。 将蚀刻掩模施加到第二功能层。 通过使用第一和第二蚀刻停止层通过蚀刻方法和/或通过使用第一和第二蚀刻停止层将第二功能层和第一功能层图案化为牺牲层。 通过补充基板的图案化，可以使用该方法来实现附加的可移动流体元件。 该方法优选用于制造具有外延多晶硅层作为泵膜的微型泵。

    Method for the production of a micromechanical part preferably used for fluidic applications, and micropump comprising a pump membrane made of a polysilicon layer
    5.
    发明申请
    Method for the production of a micromechanical part preferably used for fluidic applications, and micropump comprising a pump membrane made of a polysilicon layer 失效
    用于生产优选用于流体应用的微机械部件的方法以及包括由多晶硅层制成的泵膜的微型泵

    公开(公告)号：US20060186085A1

    公开(公告)日：2006-08-24

    申请号：US10564370

    申请日：2004-07-07

    申请人： Matthias Fuertsch ,  Hubert Benzel ,  Stefan Finkbeiner ,  Stefan Pinter ,  Frank Fischer ,  Heiko Stahl ,  Tjalf Pirk

    发明人： Matthias Fuertsch ,  Hubert Benzel ,  Stefan Finkbeiner ,  Stefan Pinter ,  Frank Fischer ,  Heiko Stahl ,  Tjalf Pirk

    IPC分类号： C23F1/00 ,  F04B17/00

    CPC分类号： F04B43/043

    摘要： A method for producing a micromechanical component, preferably for fluidic applications having cavities. The component is constructed from two functional layers, the two functional layers being patterned differently using micromechanical methods. A first etch stop layer having a first pattern is applied to a base plate. A first functional layer is applied to the first etch stop layer and to the first contact surfaces of the base plate. A second etch stop layer, having a second pattern, is applied to first functional layer. A second functional layer is applied to the second etch stop layer and to the second contact surfaces of the first functional layer. An etching mask is applied to the second functional layer. The second and the first functional layer are patterned as sacrificial layers by the use of the first and the second etch stop layer by etching methods and/or by using the first and the second etch stop layer. By supplementing patterning of the base plate, additional movable fluidic elements may be implemented, using the method. The method is preferably used for producing a micropump having an epitactic polysilicon layer as the pump diaphragm.

    摘要翻译： 用于制造微机械部件的方法，优选用于具有空腔的流体应用。 该组件由两个功能层构成，两个功能层使用微机械方法被不同地图案化。 将具有第一图案的第一蚀刻停止层施加到基板。 第一功能层被施加到第一蚀刻停止层和基板的第一接触表面。 具有第二图案的第二蚀刻停止层被施加到第一功能层。 第二功能层被施加到第二蚀刻停止层和第一功能层的第二接触表面。 将蚀刻掩模施加到第二功能层。 通过使用第一和第二蚀刻停止层通过蚀刻方法和/或通过使用第一和第二蚀刻停止层将第二功能层和第一功能层图案化为牺牲层。 通过补充基板的图案化，可以使用该方法来实现附加的可移动流体元件。 该方法优选用于制造具有外延多晶硅层作为泵膜的微型泵。

    MAGNETICALLY DRIVABLE MICROMIRROR
    7.
    发明申请
    MAGNETICALLY DRIVABLE MICROMIRROR 有权
    磁力驱动微型机

    公开(公告)号：US20140092458A1

    公开(公告)日：2014-04-03

    申请号：US13976301

    申请日：2011-11-09

    申请人： Stefan Pinter ,  Heribert Weber ,  Frank Fischer ,  Michael Krueger ,  Joerg Muchow ,  Christoph Friese

    发明人： Stefan Pinter ,  Heribert Weber ,  Frank Fischer ,  Michael Krueger ,  Joerg Muchow ,  Christoph Friese

    IPC分类号： G02B7/182 ,  G02B26/12

    CPC分类号： G02B7/1821 ,  G02B26/085 ,  G02B26/101 ,  G02B26/105 ,  G02B26/12

    摘要： A magnetically drivable micromirror having an outer frame, a coil former, and torsion springs, situated in a first plane, the torsion springs having an axis of rotation, and the coil former being connected to the outer frame by the torsion springs so as to be capable of rotational motion about the axis of rotation, having a mirror element that is situated in a second plane parallel to the first plane, the mirror element being connected to the coil former by an intermediate layer. A 2D scanner having a first magnetically drivable micromirror and a second drivable mirror, and to a method for producing a micromirror are also described.

    摘要翻译： 具有位于第一平面中的外框架，线圈架和扭力弹簧的磁性可驱动微镜，所述扭转弹簧具有旋转轴线，并且所述线圈架通过所述扭转弹簧连接到所述外框架，从而为 能够围绕旋转轴线旋转运动，具有位于平行于第一平面的第二平面中的反射镜元件，镜元件通过中间层连接到线圈架。 还描述了具有第一磁性驱动微镜和第二可驱动镜的2D扫描仪以及用于制造微镜的方法。

    Cascaded micromechanical actuator structure
    10.
    发明授权
    Cascaded micromechanical actuator structure 有权
    级联微机械致动器结构

    公开(公告)号：US09195054B2

    公开(公告)日：2015-11-24

    申请号：US13124468

    申请日：2009-08-24

    申请人： Tjalf Pirk ,  Stefan Pinter ,  Joerg Muchow ,  Joachim Fritz ,  Christoph Friese

    发明人： Tjalf Pirk ,  Stefan Pinter ,  Joerg Muchow ,  Joachim Fritz ,  Christoph Friese

    IPC分类号： H02N1/06 ,  G02B26/08 ,  B81B3/00 ,  H02N1/00

    CPC分类号： G02B26/0833 ,  B81B3/004 ,  B81B2201/033 ,  B81B2203/058 ,  G02B26/0841 ,  H02N1/006

    摘要： A cascaded micromechanical actuator structure for rotating a micromechanical component about a rotation axis is described. The structure includes a torsion spring device which, on the one hand, is attached to a mount and to which, on the other hand, the micromechanical component is attachable. The torsion spring device has a plurality of torsion springs which run along or parallel to the rotation axis. The structure includes a rotary drive device having a plurality of rotary drives which are connected to the torsion spring device in such a way that each rotary drive contributes a fraction to an overall rotation angle of a micromechanical component about the rotation axis.

    摘要翻译： 描述了用于围绕旋转轴线旋转微机械部件的级联微机械致动器结构。 该结构包括一个扭力弹簧装置，一方面，该弹簧装置附接到安装件，另一方面，微型机械部件可附接到该扭力弹簧装置。 扭转弹簧装置具有沿旋转轴线或平行于旋转轴线延伸的多个扭转弹簧。 该结构包括具有多个旋转驱动器的旋转驱动装置，其连接到扭转弹簧装置，使得每个旋转驱动器对微机械部件围绕旋转轴线的整个旋转角贡献分数。