Invention Application
- Patent Title: Voltage controlled oscillator
- Patent Title (中): 压控振荡器
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Application No.: US10935264Application Date: 2004-09-08
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Publication No.: US20050099236A1Publication Date: 2005-05-12
- Inventor: Takashi Kawakubo , Kazuhide Abe , Mayumi Morizuka
- Applicant: Takashi Kawakubo , Kazuhide Abe , Mayumi Morizuka
- Priority: JP2003-327688 20030919
- Main IPC: H03B5/30
- IPC: H03B5/30 ; H03B5/32 ; H03B5/36 ; H03H9/02 ; H03H9/05 ; H03H9/17 ; H03H9/00

Abstract:
The present invention provides a voltage controlled oscillator comprising an thin film BAW resonator and a variable capacitor element. The thin film BAW resonator includes an anchor section formed on a Si substrate, a lower electrode supported on the anchor section and positioned to face the Si substrate, a first piezoelectric film formed on the lower electrode, and an upper electrode formed on the first piezoelectric film. On the other hand, the variable capacitor element includes a stationary electrode formed on a Si substrate, an anchor section formed on the Si substrate, a first electrode supported on the anchor section and positioned to face the Si substrate, a second piezoelectric film formed on the first electrode, and a second electrode formed on the second piezoelectric film.
Public/Granted literature
- US07211933B2 Voltage controlled oscillator Public/Granted day:2007-05-01
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