Invention Application
- Patent Title: Manufacturing method of micro-lens, manufacturing method of solid-state image pickup device and solid-state image pickup device
- Patent Title (中): 微透镜的制造方法，固体摄像装置的制造方法以及固体摄像装置
-
Application No.: US10980332Application Date: 2004-11-04
-
Publication No.: US20050099695A1Publication Date: 2005-05-12
- Inventor: Kazuyuki Takegawa , Ryoji Matsui , Tetsuya Yamada , Tsutomu Imai , Seiji Kai , Yuko Tanaka
- Applicant: Kazuyuki Takegawa , Ryoji Matsui , Tetsuya Yamada , Tsutomu Imai , Seiji Kai , Yuko Tanaka
- Applicant Address: JP Moriguchi-shi
- Assignee: SANYO ELECTRIC CO., LTD.
- Current Assignee: SANYO ELECTRIC CO., LTD.
- Current Assignee Address: JP Moriguchi-shi
- Priority: JP2003-381683 20031111
- Main IPC: H01L27/146
- IPC: H01L27/146 ; G02B3/00 ; H01L27/14 ; H01L31/10 ; G02B27/10
Abstract:
The present invention intends to provide a manufacturing method of a heat resistant micro-lens. The manufacturing method includes forming on a substrate an inorganic film having the optical transparency; forming, at positions that are on the inorganic film and correspond to lens formation positions, a resist films; etching a portion where the resist films are not formed of the inorganic film; removing the resist films that remain; and irradiating inert gas ions to the inorganic film from which the resist films are removed and that is patterned according to the etching.
Public/Granted literature
Information query
IPC分类:
