发明申请
- 专利标题: Semiconductor sensing device
- 专利标题(中): 半导体感测装置
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申请号: US10721803申请日: 2003-11-25
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公开(公告)号: US20050110053A1公开(公告)日: 2005-05-26
- 发明人: Michael Shur , Remigijus Gaska , Yuriy Bilenko
- 申请人: Michael Shur , Remigijus Gaska , Yuriy Bilenko
- 主分类号: G01N27/26
- IPC分类号: G01N27/26 ; G01N27/414 ; H01L21/00 ; H01L23/58
摘要:
A semiconductor sensing device in which a sensing layer is exposed to a medium being tested in an area below and/or adjacent to a contact. In one embodiment, the device comprises a field effect transistor in which the sensing layer is disposed below a gate contact. The sensing layer is exposed to the medium by one or more perforations that are included in the gate contact and/or one or more layers disposed above the sensing layer. The sensing layer can comprise a dielectric layer, a semiconductor layer, or the like.
公开/授权文献
- US07382004B2 Semiconductor sensing device 公开/授权日:2008-06-03
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